Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education, School of Physics and Electronics, Hunan University, Changsha 410082, China ...

enhanced reoperation of 6-inch to 12-inch wafers using industry-standard wafer cassettes and FOUPs, and can also support mobile robot and overhead transfers of wafers in those FOUPs. This is a ...

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The major manufacturers of global semiconductor FOUP and FOSB wafer cassettes are Entegris, Shin-Etsu Polymer, Miraial, Chuang King Enterprise, Gudeng Precision, 3S Korea, Dainichi Shoji, etc. The top ...

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