One of the unexplored frontiers in ALD is the enhancement of ALD reactions using non-thermal methods. We are exploring the ability of low energy electrons to enhance ALD reactions. The goal is to ...

system provides a wide range of optimized high-quality plasma ALD and thermal ALD procedures. The ALD product line includes a variety of instruments to satisfy different needs of small-scale ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure Gradian is a laboratory-scale ALD tool ...

Solar-thermal Processing: Ultra-high temperatures above 1200oC can ... Novel surface science characterization of low – cycle (less than 6 ALD cycles) ALD film deposition on Li-ion battery cathode ...

Thermal and Plasma-Enhanced ALD furnace tools achieved process qualification. ACM announced the achievement of process qualification of its Ultra Fn A Plasma-Enhanced Atomic Layer Deposition ...

The result is a new generation ALD platform capable of doing thermal as well as plasma-enhanced deposition. Cambridge NanoTech has combined its leading ALD expertise with advanced Computational Fluid ...

PVD techniques, such as sputtering and thermal evaporation, involve the physical vaporization ... conformal films with excellent step coverage. ALD is a highly precise and controlled deposition method ...