One of the unexplored frontiers in ALD is the enhancement of ALD reactions using non-thermal methods. We are exploring the ability of low energy electrons to enhance ALD reactions. The goal is to ...

system provides a wide range of optimized high-quality plasma ALD and thermal ALD procedures. The ALD product line includes a variety of instruments to satisfy different needs of small-scale ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure Gradian is a laboratory-scale ALD tool ...

Solar-thermal Processing: Ultra-high temperatures above 1200oC can ... Novel surface science characterization of low – cycle (less than 6 ALD cycles) ALD film deposition on Li-ion battery cathode ...

Thermal and Plasma-Enhanced ALD furnace tools achieved process qualification. ACM announced the achievement of process qualification of its Ultra Fn A Plasma-Enhanced Atomic Layer Deposition ...

The result is a new generation ALD platform capable of doing thermal as well as plasma-enhanced deposition. Cambridge NanoTech has combined its leading ALD expertise with advanced Computational Fluid ...