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![Schematic structure of the chemical mechanical polishing apparatus [89]. | Download Scientific ...](/images/search?view=detailV2&id=F70465083EFBD2EBFF346660AF6906B4A325F01F&thid=OIP.wFYYpoqToXWBtBulHixGfQHaD3&mediaurl=https%3a%2f%2fwww.researchgate.net%2fpublication%2f349567787%2ffigure%2ffig11%2fAS%3a994776547614728%401614184619303%2fSchematic-structure-of-the-chemical-mechanical-polishing-apparatus-89.png&exph=377&expw=723&q=chemical+mechanical+polishing+defects&simid=608053695240209731&ck=DAD9C7CBD9A35BC52C97D3F6A197F43A&itb=0&FORM=IVCLIG)
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